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Wet Processing Systems
nanoCHEM
Advanced Precision Wet Processing
The nanoCHEM is an advanced precision wet processing platform engineered for semiconductor, MEMS, and microfabrication applications requiring highly controlled chemical processing environments.
Features
Advanced technologies supported through trusted global partnerships.
- Controlled Wet Chemical Processing
Highly repeatable developing, etching, cleaning and lift-off workflows.
- High Contamination Control
Engineered for ultra-clean processing in semiconductor and MEMS fabs.
- Flexible Fabrication Integration
Compatible with coating and thermal workflows for end-to-end processing.
- Research to Pilot-Scale Compatibility
Supports laboratory R&D through to pilot-scale production runs.
Specifications
Technical profile.
Technology
Precision Wet Processing
Process Capability
Developing, Etching, Cleaning & Lift-Off
Application Environment
Semiconductor & MEMS Fabrication
Process Control
High Repeatability Chemical Processing
Contamination Management
Advanced Contamination Control
Integration Capability
Coating & Thermal Workflow Compatible
System Configuration
Flexible Process Integration Platform
Production Compatibility
Research & Pilot Scale
Processing Stability
High Stability Wet Processing
Workflow Type
Advanced Microfabrication Support
Applications
Semiconductor FabricationMEMS Process DevelopmentLithography Support ProcessingWet Chemical EtchingThin Film FabricationAdvanced Packaging Workflows